The ion beam figuring machine ÅFiSy IFS300 independently developed by Changsha ÅFiSy Technology Co., Ltd. has 3-axis linkage function and can process the work-piece with a maximum size of 300mm×300mm, and also has the processing capacity of plane, spherical, aspherical, off-axis, and free-form surfaces. The ÅFiSy IFS300 is shown in Fig. 1, and its internal structure is shown in Fig. 2. ÅFiSy IFS300 is mainly composed of vacuum system, motion system, ion source system, electrical control and corresponding software. The vacuum system is composed of a main vacuu chamber, an auxiliary vacuum chamber, a gate valve connecting the main and auxiliary vacuum chambers and corresponding vacuum pump sets. The motion system consists of X/Y/Z three-axis motion mechanism. The ion source is installed on the X/Y motion mechanism located in the main vacuum chamber, and its high-precision motion control can be realized by the numerical control system. The workpiece can be moved to the machining position through the Zaxis installed in the auxiliary vacuum chamber. ÅFiSy IFS300 has X/Y/Z three-axis linkage function. The structural composition and functional logic relationship of each part of ÅFiSy IFS300 are shown in Fig. 3.